IP Library Granted Patent US 5,773,352
Granted Patent Utility
US 5,773,352 · App. 08/408,959

Fabrication process of bonded total dielectric isolation substrate

Inventor: Tomohiro Hamajima
Patented Case View Patent ↗
Granted: Jun 30, 1998 Filed: Mar 23, 1995
Inventor
Tomohiro Hamajima
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,773,352
App. No.
08/408,959
Filed
1995-03-23
Granted
1998-06-30
Kind
A