IP Library › Granted Patent US 5,773,890
Granted Patent Utility
US 5,773,890 · App. 08/703,533

Semiconductor device that prevents peeling of a titanium nitride film

Inventors: Tomoyuki Uchiyama, Yasuo Kasagi
Patented Case View Patent ↗
Granted: Jun 30, 1998 Filed: Aug 27, 1996
Inventors
Tomoyuki Uchiyama
Yasuo Kasagi
Assignee (at issue)
NIPPON STEEL CORPORATION

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Quick Facts
Patent No.
US 5,773,890
App. No.
08/703,533
Filed
1996-08-27
Granted
1998-06-30
Kind
A