IP Library Granted Patent US 5,776,327
Granted Patent Utility
US 5,776,327 · App. 08/732,655

Method and apparatus using an anode basket for electroplating a workpiece

Inventors: Robert R. Botts, Swati V. Joshi, Louis W. Nicholls
Patented Case View Patent ↗
Granted: Jul 7, 1998 Filed: Oct 16, 1996
Inventors
Robert R. Botts
Swati V. Joshi
Louis W. Nicholls
Assignee (at issue)
Mitsubishi Semiconuctor Americe, Inc.

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Quick Facts
Patent No.
US 5,776,327
App. No.
08/732,655
Filed
1996-10-16
Granted
1998-07-07
Kind
A