Granted Patent
Utility
US 5,776,657 · App. 08/614,613
Wet-chemical developable, etch-stable photoresist for UV radiation with a wavelength below 200 NM
Inventors:
Ulrich Schaedeli, Manfred Hofmann, Norbert Muenzel, Arnold Grubenmann
Patented Case
View Patent ↗
Granted: Jul 7, 1998
Filed: Mar 14, 1996
Inventors
Ulrich Schaedeli
Manfred Hofmann
Norbert Muenzel
Arnold Grubenmann
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.