IP Library Granted Patent US 5,778,682
Granted Patent Utility
US 5,778,682 · App. 08/666,257

Reactive PVD with NEG pump

Inventor: Luc Ouellet
Patented Case View Patent ↗
Granted: Jul 14, 1998 Filed: Jun 20, 1996
Inventor
Luc Ouellet
Assignee (at issue)
Mitel Corporation

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Quick Facts
Patent No.
US 5,778,682
App. No.
08/666,257
Filed
1996-06-20
Granted
1998-07-14
Kind
A