Granted Patent
Utility
US 5,779,797 · App. 08/747,086
Wafer boat for vertical diffusion and vapor growth furnace
Inventor:
Tomohisa Kitano
Patented Case
View Patent ↗
Granted: Jul 14, 1998
Filed: Nov 13, 1996
Inventor
Tomohisa Kitano
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.