Granted Patent
Utility
US 5,779,928 · App. 08/799,478
Film dissolution method of dissolving silica-based coating film formed on surface of a substrate
Inventors:
Tetsuro Yamashita, Tsuyoshi Mitsuhashi, Manabu Yabe
Patented Case
View Patent ↗
Granted: Jul 14, 1998
Filed: Feb 12, 1997
Inventors
Tetsuro Yamashita
Tsuyoshi Mitsuhashi
Manabu Yabe
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.