Granted Patent
Utility
US 5,783,282 · App. 08/726,657
Resputtering to achieve better step coverage of contact holes
Inventor:
Shane P. Leiphart
Patented Case
View Patent ↗
Granted: Jul 21, 1998
Filed: Oct 7, 1996
Inventor
Shane P. Leiphart
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.