Granted Patent
Utility
US 5,789,309 · App. 08/774,519
Method and system for monocrystalline epitaxial deposition
Inventor:
Lance G. Hellwig
Patented Case
View Patent ↗
Granted: Aug 4, 1998
Filed: Dec 30, 1996
Inventor
Lance G. Hellwig
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.