Granted Patent
Utility
US 5,791,978 · App. 08/751,014
Bearing assembly for wafer planarization carrier
Inventors:
Joseph V. Cesna, Gordon J. Grosslight, Chris Karlsrud
Patented Case
View Patent ↗
Granted: Aug 11, 1998
Filed: Nov 14, 1996
Inventors
Joseph V. Cesna
Gordon J. Grosslight
Chris Karlsrud
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.