Granted Patent
Utility
US 5,795,381 · App. 08/711,085
SIO probe for real-time monitoring and control of oxygen during czochralski growth of single crystal silicon
Inventor:
John D. Holder
Patented Case
View Patent ↗
Granted: Aug 18, 1998
Filed: Sep 9, 1996
Inventor
John D. Holder
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.