Granted Patent
Utility
US 5,795,451 · App. 08/874,075
Sputtering apparatus with a rotating magnet array
Inventors:
Swie-In Tan, David Ian Charles Pearson
Patented Case
View Patent ↗
Granted: Aug 18, 1998
Filed: Jun 12, 1997
Inventors
Swie-In Tan
David Ian Charles Pearson
Assignees (at issue)
Read Rite Corporation
Nordiko, Ltd. CNT GBX COD 03 ITX one half interest
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.