IP Library Granted Patent US 5,798,201
Granted Patent Utility
US 5,798,201 · App. 08/887,466

Radiation sensitive resin composition

Inventors: Katsumi Inomata, Nasahiro Akiyama, Toshiyuki Ota, Akira Tsuji
Patented Case View Patent ↗
Granted: Aug 25, 1998 Filed: Jul 2, 1997
Inventors
Katsumi Inomata
Nasahiro Akiyama
Toshiyuki Ota
Akira Tsuji
Assignees (at issue)
Japan Synthetic Rubber Corporation
ARAKAWA CHEMICAL INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 5,798,201
App. No.
08/887,466
Filed
1997-07-02
Granted
1998-08-25
Kind
A