Granted Patent
Utility
US 5,798,532 · App. 08/871,543
Apparatus for determining warp in semiconductor wafer cassettes
Inventor:
Daniel Linehan
Patented Case
View Patent ↗
Granted: Aug 25, 1998
Filed: Jun 9, 1997
Inventor
Daniel Linehan
Assignee (at issue)
Integrated Device Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.