IP Library Granted Patent US 5,800,577
Granted Patent Utility
US 5,800,577 · App. 08/895,954

Polishing composition for chemical mechanical polishing

Inventor: Takanori Kido
Patented Case View Patent ↗
Granted: Sep 1, 1998 Filed: Jul 17, 1997
Inventor
Takanori Kido
Assignee (at issue)
Showa Denko K.K.

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Quick Facts
Patent No.
US 5,800,577
App. No.
08/895,954
Filed
1997-07-17
Granted
1998-09-01
Kind
A