Granted Patent
Utility
US 5,800,951 · App. 08/754,367
Exposure method and exposure mask with monitoring patterns
Inventor:
Takeo Hashimoto
Patented Case
View Patent ↗
Granted: Sep 1, 1998
Filed: Nov 22, 1996
Inventor
Takeo Hashimoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.