Granted Patent
Utility
US 5,801,104 · App. 08/547,561
Uniform dielectric film deposition on textured surfaces
Inventors:
Klaus Schuegraf, Pierre C. Fazan
Patented Case
View Patent ↗
Granted: Sep 1, 1998
Filed: Oct 24, 1995
Inventors
Klaus Schuegraf
Pierre C. Fazan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.