Granted Patent
Utility
US 5,801,388 · App. 08/669,481
Particle beam, in particular ionic optic imaging system
Inventors:
Gerhard Stengl, Alfred Chalupka, Herbert Vonach
Patented Case
View Patent ↗
Granted: Sep 1, 1998
Filed: Sep 17, 1996
Inventors
Gerhard Stengl
Alfred Chalupka
Herbert Vonach
Assignee (at issue)
IMS-Ionen Mikrofabrikationas Systeme
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.