Granted Patent
Utility
US 5,801,821 · App. 08/497,321
Photolithography method using coherence distance control
Inventor:
Yan Borodovsky
Patented Case
View Patent ↗
Granted: Sep 1, 1998
Filed: Jun 30, 1995
Inventor
Yan Borodovsky
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.