IP Library Granted Patent US 5,804,821
Granted Patent Utility
US 5,804,821 · App. 08/856,605

Plasma ion source mass analyzer

Inventor: Yoshitomo Nakagawa
Patented Case View Patent ↗
Granted: Sep 8, 1998 Filed: May 15, 1997
Inventor
Yoshitomo Nakagawa
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,804,821
App. No.
08/856,605
Filed
1997-05-15
Granted
1998-09-08
Kind
A