Granted Patent
Utility
US 5,807,649 · App. 08/740,598
Lithographic patterning method and mask set therefor with light field trim mask
Inventors:
Lars Liebmann, David S. O'Grady, Richard A. Ferguson, William J. Adair
Patented Case
View Patent ↗
Granted: Sep 15, 1998
Filed: Oct 31, 1996
Inventors
Lars Liebmann
David S. O'Grady
Richard A. Ferguson
William J. Adair
Assignees (at issue)
International Business Machines Corporation
LOCKHEED MARTIN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.