Granted Patent
Utility
US 5,810,983 · App. 08/790,033
High purity cobalt sputtering targets
Inventors:
Yuichiro Shindo, Tsuneo Suzuki
Patented Case
View Patent ↗
Granted: Sep 22, 1998
Filed: Jan 28, 1997
Inventors
Yuichiro Shindo
Tsuneo Suzuki
Assignee (at issue)
Japan Energy Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.