Granted Patent
Utility
US 5,812,271 · App. 08/575,751
Reticle pre-alignment apparatus and method thereof
Inventor:
Sung-Wook Kim
Patented Case
View Patent ↗
Granted: Sep 22, 1998
Filed: Dec 20, 1995
Inventor
Sung-Wook Kim
Assignee (at issue)
Samsung Aerospace Industries, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.