Granted Patent
Utility
US 5,817,539 · App. 08/780,489
Production method for a micromechanical component with a movable structure
Inventor:
Wolfgang Werner
Patented Case
View Patent ↗
Granted: Oct 6, 1998
Filed: Jan 8, 1997
Inventor
Wolfgang Werner
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.