IP Library › Granted Patent US 5,819,684
Granted Patent Utility
US 5,819,684 · App. 08/661,461

Gas injection system for reaction chambers in CVD systems

Inventors: Mark Hawkins, McDonald Robinson
Patented Case View Patent ↗
Granted: Oct 13, 1998 Filed: Jun 10, 1996
Inventors
Mark Hawkins
McDonald Robinson

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Quick Facts
Patent No.
US 5,819,684
App. No.
08/661,461
Filed
1996-06-10
Granted
1998-10-13
Kind
A