IP Library › Granted Patent US 5,821,157
Granted Patent Utility
US 5,821,157 · App. 08/632,840

Argon amorphizing polysilicon layer fabrication

Inventors: Joo-Hyung Lee, Jae-Jong Han
Patented Case View Patent ↗
Granted: Oct 13, 1998 Filed: Apr 16, 1996
Inventors
Joo-Hyung Lee
Jae-Jong Han
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.

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Quick Facts
Patent No.
US 5,821,157
App. No.
08/632,840
Filed
1996-04-16
Granted
1998-10-13
Kind
A