Granted Patent
Utility
US 5,821,159 · App. 08/773,345
Thin film transistor substrate having low resistive and chemical resistant electrode interconnections and method of forming the same
Inventor:
Tooru Ukita
Patented Case
View Patent ↗
Granted: Oct 13, 1998
Filed: Dec 26, 1996
Inventor
Tooru Ukita
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.