Granted Patent
Utility
US 5,821,165 · App. 08/654,679
Method of fabricating semiconductor devices
Inventor:
Teruo Asami
Patented Case
View Patent ↗
Granted: Oct 13, 1998
Filed: May 29, 1996
Inventor
Teruo Asami
Assignee (at issue)
Nippon Steel Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.