Granted Patent
Utility
US 5,822,172 · App. 08/779,899
Apparatus and method for temperature control of workpieces in vacuum
Inventor:
Nicholas R. White
Patented Case
View Patent ↗
Granted: Oct 13, 1998
Filed: Jan 7, 1997
Inventor
Nicholas R. White
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.