Granted Patent
Utility
US 5,823,736 · App. 08/610,712
Substrate processing device and method for substrate from the substrate processing device
Inventor:
Yoshio Matsumura
Patented Case
View Patent ↗
Granted: Oct 20, 1998
Filed: Mar 4, 1996
Inventor
Yoshio Matsumura
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.