Granted Patent
Utility
US 5,824,233 · App. 08/756,348
Micromechanical component with a dielectric movable structure, microsystem, and production process
Inventor:
Thomas Zettler
Patented Case
View Patent ↗
Granted: Oct 20, 1998
Filed: Nov 26, 1996
Inventor
Thomas Zettler
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.