Granted Patent
Utility
US 5,827,786 · App. 08/853,229
Charged particle deposition of electrically insulating films
Inventor:
Joseph Puretz
Patented Case
View Patent ↗
Granted: Oct 27, 1998
Filed: Apr 28, 1997
Inventor
Joseph Puretz
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.