Granted Patent
Utility
US 5,828,098 · App. 08/667,913
Semiconductor capacitor dielectric having various grain sizes
Inventors:
Yasuhiro Shimada, Yasuhiro Uemoto, Atsuo Inoue, Taketoshi Matsuura, Masamichi Azuma
Patented Case
View Patent ↗
Granted: Oct 27, 1998
Filed: Jun 20, 1996
Inventors
Yasuhiro Shimada
Yasuhiro Uemoto
Atsuo Inoue
Taketoshi Matsuura
Masamichi Azuma
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.