Granted Patent
Utility
US 5,828,142 · App. 08/918,704
Platen for use with lithographic stages and method of making same
Inventor:
Craig R. Simpson
Patented Case
View Patent ↗
Granted: Oct 27, 1998
Filed: Aug 22, 1997
Inventor
Craig R. Simpson
Assignee (at issue)
MRS Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.