Granted Patent
Utility
US 5,830,331 · App. 08/311,529
Apparatus and method for sputtering carbon
Inventors:
Taesun Kim, Hyung-Jin Lee, Yao-Tzung Roger Shih, John Bruno, Robert B. Zubeck, Dennis R. Hollars
Patented Case
View Patent ↗
Granted: Nov 3, 1998
Filed: Sep 23, 1994
Inventors
Taesun Kim
Hyung-Jin Lee
Yao-Tzung Roger Shih
John Bruno
Robert B. Zubeck
Dennis R. Hollars
Assignee (at issue)
Seagate Technology LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.