Granted Patent
Utility
US 5,830,619 · App. 08/777,008
Resist materials
Inventors:
Evelyn Chin, Francis Houlihan, Omkaram Nalamasu
Patented Case
View Patent ↗
Granted: Nov 3, 1998
Filed: Jan 7, 1997
Inventors
Evelyn Chin
Francis Houlihan
Omkaram Nalamasu
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.