Granted Patent
Utility
US 5,834,332 · App. 08/935,384
Micromechanical semiconductor components and manufacturing method therefor
Inventors:
Christofer Hierold, Thomas Scheiter, Markus Biebl, Helmut Klose
Patented Case
View Patent ↗
Granted: Nov 10, 1998
Filed: Sep 23, 1997
Inventors
Christofer Hierold
Thomas Scheiter
Markus Biebl
Helmut Klose
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.