Granted Patent
Utility
US 5,834,368 · App. 08/814,601
Integrated circuit with a metal silicide film uniformly formed
Inventors:
Hiroshi Kawaguchi, Isami Sakai
Patented Case
View Patent ↗
Granted: Nov 10, 1998
Filed: Mar 10, 1997
Inventors
Hiroshi Kawaguchi
Isami Sakai
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.