Granted Patent
Utility
US 5,834,645 · App. 08/889,999
Methods and apparatus for the in-process detection of workpieces with a physical contact probe
Inventors:
Anthony L. Bartels, Bob Allen, Chris Karlsrud, Joe Mosca
Patented Case
View Patent ↗
Granted: Nov 10, 1998
Filed: Jul 10, 1997
Inventors
Anthony L. Bartels
Bob Allen
Chris Karlsrud
Joe Mosca
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.