Granted Patent
Utility
US 5,835,520 · App. 08/842,305
Very narrow band KrF laser
Inventors:
Palash P. Das, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Nov 10, 1998
Filed: Apr 23, 1997
Inventors
Palash P. Das
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.