Granted Patent
Utility
US 5,837,578 · App. 08/895,107
Process of manufacturing a trenched stack-capacitor
Inventors:
Der-Tsyr Fan, Jyh-Min Tsaur, Chon-Shin Jou, Tings Wang
Patented Case
View Patent ↗
Granted: Nov 17, 1998
Filed: Jul 16, 1997
Inventors
Der-Tsyr Fan
Jyh-Min Tsaur
Chon-Shin Jou
Tings Wang
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.