Granted Patent
Utility
US 5,837,591 · App. 08/803,144
Method of manufacturing a semiconductor device
Inventors:
Yasuhiro Shimada, Atsuo Inoue, Koji Arita, Toru Nasu, Yoshihisa Nagano, Akihiro Matsuda
Patented Case
View Patent ↗
Granted: Nov 17, 1998
Filed: Feb 19, 1997
Inventors
Yasuhiro Shimada
Atsuo Inoue
Koji Arita
Toru Nasu
Yoshihisa Nagano
Akihiro Matsuda
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.