Granted Patent
Utility
US 5,837,596 · App. 08/408,411
Field oxide formation by oxidation of polysilicon layer
Inventors:
Thomas A. Figura, Nanseng Jeng
Patented Case
View Patent ↗
Granted: Nov 17, 1998
Filed: Mar 20, 1995
Inventors
Thomas A. Figura
Nanseng Jeng
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.