Granted Patent
Utility
US 5,838,006 · App. 08/733,673
Conical baffle for reducing charging drift in a particle beam system
Inventors:
Lee H. Veneklasen, Lydia J. Young
Patented Case
View Patent ↗
Granted: Nov 17, 1998
Filed: Oct 17, 1996
Inventors
Lee H. Veneklasen
Lydia J. Young
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.