Granted Patent
Utility
US 5,838,528 · App. 08/883,366
Electrostatic chuck assembly
Inventors:
Ron van Os, Eric D. Ross
Patented Case
View Patent ↗
Granted: Nov 17, 1998
Filed: Jun 26, 1997
Inventors
Ron van Os
Eric D. Ross
Assignee (at issue)
Watkins-Johnson Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.