Granted Patent
Utility
US 5,840,200 · App. 08/788,310
Method of manufacturing semiconductor devices
Inventors:
Satoshi Nakagawa, Toyoji Ito, Yoji Bito, Yoshihisa Nagano
Patented Case
View Patent ↗
Granted: Nov 24, 1998
Filed: Jan 24, 1997
Inventors
Satoshi Nakagawa
Toyoji Ito
Yoji Bito
Yoshihisa Nagano
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.