Granted Patent
Utility
US 5,840,202 · App. 08/639,185
Apparatus and method for shaping polishing pads
Inventor:
Robert J. Walsh
Patented Case
View Patent ↗
Granted: Nov 24, 1998
Filed: Apr 26, 1996
Inventor
Robert J. Walsh
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.