IP Library Granted Patent US 5,840,613
Granted Patent Utility
US 5,840,613 · App. 08/873,357

Fabrication method for semiconductor device

Inventor: Fumihiko Sato
Patented Case View Patent ↗
Granted: Nov 24, 1998 Filed: Jun 12, 1997
Inventor
Fumihiko Sato
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,840,613
App. No.
08/873,357
Filed
1997-06-12
Granted
1998-11-24
Kind
A