Granted Patent
Utility
US 5,841,515 · App. 08/688,749
Substrate container cassette, interface mechanism, and substrate processing
Inventor:
Masami Ohtani
Patented Case
View Patent ↗
Granted: Nov 24, 1998
Filed: Jul 31, 1996
Inventor
Masami Ohtani
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.