Granted Patent
Utility
US 5,842,912 · App. 08/683,571
Apparatus for conditioning polishing pads utilizing brazed diamond technology
Inventors:
Paul Holzapfel, Thomas K. Crosby, Richard J. Kruse, Larry Biddlingmeier, Jim Schlueter
Patented Case
View Patent ↗
Granted: Dec 1, 1998
Filed: Jul 15, 1996
Inventors
Paul Holzapfel
Thomas K. Crosby
Richard J. Kruse
Larry Biddlingmeier
Jim Schlueter
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.